Functional Thin Film Processing and Characterization Group

 
Department of Electrical Engineering Dwight Look College of Engineering Texas A & M University
  
  
  
  
  
  
 
 
 
 
  

    Group Capabilities

    1.   Various ceramic, metallic and other thin films processed by pulsed laser deposition (PLD) and solution based processing technique.

    2.   Thin film microstructural characterizations using TEM, HRTEM, and STEM (with EELS analysis).

    3.   Cleanroom (available at Institute of Solid State Electronics, Dept. of Electrical Engineering, TAMU).

Major Equipments

    1.   Pulsed Laser Deposition (PLD) system;

     Lambda Physik COMPex Pro 205 High-Pulse Energy Excimer Laser (KrF, Max. Pulse Energy 700mJ, Max. Rep. Rate 50Hz, Average Power 30W);

    12” spherical chamber with programmable and exchangeable 6-target holder; heated substrate holder and liquid N2 cooling substrate holder for soft material deposition.

    2.   Magnetron sputtering deposition with UHV (2” gun for both DC and AC  sputtering)

 

    3.  
TEM sample preparation tools: slow speed saw, polisher, dimpler, precision ion polisher and optical microscopes

    4.  
Ceramic bulk processing tools: glove box, ball milling machine, balance, hydrostatic press, tube furnaces and vacuum tube furnace

    5.  
Electrochemical measurement tools for SOFC  

    6.   Solar Cell testing station

    7.   Physical Property Measurement System with VSM head (Quantum Design)

    8.   Homemade electrical measurement systems (R-T, I-V)

    9.   In situ nanoindentation, STM, AFM holder system for in situ work in TEM column

    10. Electrochemical deposition cells and screen printing tool