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Group Capabilities
1. Various ceramic, metallic and other thin films processed by pulsed
laser deposition (PLD) and solution based processing technique.
2. Thin film microstructural characterizations using TEM, HRTEM, and
STEM (with EELS analysis).
3. Cleanroom (available at Institute of Solid State Electronics, Dept.
of Electrical Engineering, TAMU).
Major Equipments
1. Pulsed Laser
Deposition (PLD) system;

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Lambda Physik COMPex Pro 205 High-Pulse Energy
Excimer Laser (KrF, Max. Pulse Energy 700mJ, Max. Rep. Rate 50Hz, Average
Power 30W);
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12” spherical chamber with programmable and
exchangeable 6-target holder; heated substrate holder and liquid N2
cooling substrate holder for soft material deposition.
2.
Magnetron sputtering deposition with UHV (2” gun for both DC and AC
sputtering)
3.
TEM sample preparation tools: slow speed saw, polisher, dimpler, precision
ion polisher and optical microscopes
4.
Ceramic bulk processing tools: glove box, ball milling machine, balance,
hydrostatic press, tube furnaces and vacuum tube furnace
5.
Electrochemical measurement tools for SOFC
6.
Solar Cell testing station
7.
Physical Property Measurement System with VSM head (Quantum Design)

8.
Homemade electrical measurement systems (R-T, I-V)

9.
In situ
nanoindentation, STM, AFM holder system for in situ work in TEM column
10.
Electrochemical deposition cells and screen printing tool
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