Functional Thin Film
Processing and Characterization Group
Our research effort focuses on
(1) various functional thin films synthesized by Pulsed Laser Deposition
and solution-based processes, (2) thin film characterizations, and (3)
structure-property correlations.
The materials include:
Functional nitrides thin films and
nanocomposites as diffusion barriers for Cu interconnects, superhard
coatings for high temperature applications, and irradiation
tolerance coatings for advanced nuclear reactors.
Functional oxide thin films and nanocomposites
for high temperature superconductor / coated conductors,
ferroelectric materials, and thin film Solid Oxide Fuel Cells (SOFC).
Metallic thin film coatings.
Bio-compatible coatings and soft material
deposition.