Current Equipment List

Karl Suss MA6 mask aligner

Karl Suss MJB3 mask aligner

Canon deep UV curing system

Oxford PECVD system

Temescal electron beam evaporator

AMAT PECVDs

DC sputtering

Electron beam evaporator

RF sputtering

RF & DC planar magnetron sputtering

Thermco high temperature furnaces

Oxford DRIE system (ICP)

AMAT RIEs

Plasma asher

Dicing saw

Ovens

Hot plates

High speed spinners

Wet processing hoods

Polishing machines

High-powered microscopes

Wire bonder

Dektak surface profilometer

Filmetrics thin film measurement

Veeco 4-point probe

Wentworth probing system

Plasmos ellipsometer

SEM

Residual gas analyzer

Substrate / plate cleaning system

Key

Installation Pending

Operational

Additional  equipment